Hybrid on Demand Jetting System for Ultra Fine Droplet based on Electrohydrodynamic and Piezoelectric Actuation

摘要

This paper demonstrates a hybrid jetting system (HJS) using both electrohydrodynamic (EHD) force and mechanical actuation to generate ultra fine droplets with drop on demand (DOD). In the proposed HJS, liquid meniscus was formed by a piezoelectric actuator and jets were generated by EHD force. Jetting characteristics were also examined for hydrophobicity and hydrophilicity of a surface of a capillary. With the HJS, on demand jetting of femto-liter was achieved with a frequency of 5 kHz.