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Method for producing piezoelectric actuator, method for producing liquid droplet jetting apparatus, piezoelectric actuator, and liquid droplet jetting apparatus
Method for producing piezoelectric actuator, method for producing liquid droplet jetting apparatus, piezoelectric actuator, and liquid droplet jetting apparatus
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机译:压电致动器的制造方法,液滴喷射装置的制造方法,压电致动器和液滴喷射装置
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摘要
A film-forming nozzle (52) is moved so that a boundary portion of a plurality of areas on which a piezoelectric material layer (31) is formed by a film-forming nozzle moving relative to a vibration plate (30) is positioned outside deformable portions (30a) of the vibration plate and overlaps with restricted portions. This reduces stress concentration on a portion of the piezoelectric layer corresponding to the boundary portion of the deposition areas, and therefore, damage of the piezoelectric material layer is prevented.
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