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Method for producing piezoelectric actuator, method for producing liquid droplet jetting apparatus, piezoelectric actuator, and liquid droplet jetting apparatus

机译:压电致动器的制造方法,液滴喷射装置的制造方法,压电致动器和液滴喷射装置

摘要

A film-forming nozzle (52) is moved so that a boundary portion of a plurality of areas on which a piezoelectric material layer (31) is formed by a film-forming nozzle moving relative to a vibration plate (30) is positioned outside deformable portions (30a) of the vibration plate and overlaps with restricted portions. This reduces stress concentration on a portion of the piezoelectric layer corresponding to the boundary portion of the deposition areas, and therefore, damage of the piezoelectric material layer is prevented.
机译:使成膜喷嘴(52)移动,以使相对于振动板(30)移动的成膜喷嘴的形成压电材料层(31)的多个区域的边界部分位于外部变形。振动板的部分(30a)并与限制部分重叠。这减少了在压电层的与沉积区域的边界部分相对应的部分上的应力集中,因此,防止了压电材料层的损坏。

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