VARIFOCAL SCANNING MICRO-MIRROR FABRICATED FROM SILICON-ON-INSULATOR WAFER

摘要

We present a varifocal scanning micro-mirror fabricated from silicon-on-insulator wafer. The varifocal scanning micro-mirror consists of a varifocal membrane mirror with a rotational scanning function. The scanner and varifocal mirror are driven by the comb and parallel plate electrostatic actuators, respectively. The mirror rotates 5 degrees at 45V. And the varifocal mirror changes the curvature from -2m~(-1) (focal length -128mm) to +2.7m~(-1) (focal length +93mm) by applying the voltage from 0V to 50V. The laser beam was incident on the varifocal scanning micro-mirror and it is conformed that the lateral position and spot size of the reflected laser beam is changed simultaneously.