High performance control of atomic force microscope for high-speed image scanning

摘要

This paper presents the design of a model predictive control (MPC) scheme with a notch filter for reducing the tracking error of an atomic force microscope (AFM) by damping the resonant mode of the piezoelectric tube (PZT) scanner. The development of a controller for the AFM imaging and scanning speed is illustrated in this paper. Experimental results show that the proposed controller can increase the scanning speed significantly as compared with the existing PI controller.