A novel design for thermo-pneumatically actuated, membrane-based micro-mirrors is presented. Arrays of seven hexagonally shaped piston mirrors, where each mirror element is driven by a separate micro-hotplate, are described. The silicon mirror device is etched from the substrate and fixed to a 50μm thick elastomer membrane. Piston motion is achieved by thermo-pneumatically induced volume extension of a fluid, generated by platinum micro-hotplates. Large strokes, up to 80 μm, and accurate piston motion were demonstrated.
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