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Failure Analysis of Multi-Fingered HV Symmetric Devices for Charge-Pumping Circuit

机译:用于电荷泵电路多指HV对称装置的故障分析

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摘要

The purpose of this paper is to present a systematic analysis methodology for a newly taped-out High Voltage (HV) product that has encountered a 0% yield issue. In order to identify the root cause and improve the yield, a series of electrical analysis experiments designed to reveal the failure phenomenon of the charge-pumping circuit were applied. Combining spice simulation data, I-V curve measurements, CAFM measurements and nano probing, the difference in resistance for a multi-fingered symmetric device was revealed. A deductive method was then used to conduct layout analysis, and an in-line split experiment was developed to explain the failure phenomenon experienced by the multi-fingered HV symmetric device for a charge-pumping circuit.
机译:本文的目的是为新录取的高压(HV)产品提供系统分析方法,该方法遇到了0%的产量问题。为了识别根本原因并提高产量,施加了一系列用于揭示电荷泵电路的故障现象的一系列电气分析实验。组合Spice仿真数据,I-V曲线测量,CAFM测量和纳米探测,揭示了多指对称装置的电阻差。然后使用一种演绎方法来进行布局分析,开发了一种在线分流实验以说明用于电荷泵电路的多指HV对称装置所经历的失效现象。

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