Multifunctional Automatic Tester for Optical Storage and Lithography

摘要

Measurement technology plays an important role in the area of optical storage, a multifunctional quasi-dynamic static optical recording tester, which can also be used as nanometer laser direct writing lithography system, is designed and constructed for optical storage in this paper. The primary characteristics of the system are presented in detail, some experimental results are also given to show that the tester perform successfully, acting as a research platform for both optical storage and laser direct writing lithography.