Electromigration interconnect lifetime under AC and pulse DC stress

摘要

A vacancy relaxation model which predicts the DC lifetime, pulse DC lifetime, and AC lifetime for all waveforms and all frequencies above 10 kHz is proposed. The AC lifetimes of aluminum interconnect are experimentally found to be more than 10/sup 3/ times larger than DC lifetime at the same current density. AC stress lifetimes have the same dependences on current magnitude and temperature, for Tor=300 degrees C, as the DC stress lifetime.