An accurate system for automated on-wafer characterization ofthree-port devices

摘要

A general-purpose system for fast, automated acquisition of theS-parameters of three-port components is described, which is suitablefor accurate device characterization as well as RF testing of three-portcircuits in a production environment. Though based on conventional,nonrepeatable, electromechanical switches, the system achieves state ofthe art accuracy for on-wafer measurements by means of suitable hardwaredesign and the application of time-domain gating. The system is appliedto the characterization of MMIC (monolithic microwave IC) T-coils andsingle-pole double-throw (SPDT) switches. The bandwidth is now limitedto 20 GHz but can be easily upgraded to 26.5 GHz by replacing one of theswitches. Acquisition of the corrected S-parameters takes about 15seconds (51 frequency points) with a HP 9000/330 controller