Investigation of the adhesion mechanism of NiCr layers on Al₂O₃ and AlN substrates

摘要

Sputtered NiCr layers on Al₂O₃ and AlNsubstrates show a very high adhesive strength in pull tests. An effortwas made to investigate, with analytical procedures, the adhesionmechanism responsible for this. For the characterization of the surfacesand layers, element analyses were carried out with X-ray photoelectronspectroscopy and Auger electron spectroscopy. High-resolutiontransmission electron microscopy (HRTEM) studies were performed on aqualitative basis in order to obtain lattice fringes and lattice imagesof the thin overlayer and the substrate in near-interface regions. Theresults obtained lead to the conclusion that, with both ceramics, thegood adhesion is due to the chemical bonding between Cr, Al, and O