PROBLEM TO BE SOLVED: To provide a surface processing method of AlN crystal for efficiently forming a surface of proper morphology in an AlN crystal.;SOLUTION: In the surface processing method of AlN crystal, for polishing the surface of AlN crystal 1 chemically and mechanically, slurry 17 that is used in chemical mechanical polishing, contains abrasive grains having hardness higher than that of the AlN crystal 1 and abrasive grains having hardness not higher than that of the AlN crystal 1. The volume ratio of high-hardness abrasive grains to low-hardness abrasive grains in the abrasive grains 16 of the slurry 17 can be set to be in a range of 5:95-70:30.;COPYRIGHT: (C)2006,JPO&NCIPI
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