Electrochemical and Surface Analysis of the Chemical Induced Defects with Aluminum Gate CMP

摘要

The electrochemical and surface analysis of the aluminum gate in the alkaline solution with polymer were investigated by EIS and surface checked with optical microscope. the polymer of hydroxyethyl cellulose was chose for the alkaline solution additive to research the effects with the chemical induced defects in aluminum gate CMP. For the hydrophilic of the HEC with physical adsorption onto the reaction interface, it forms the passive film to retard accelerated corrosion in the alkaline solution with chemical induced defects reduced.