CONTROLLED GEOMETRY NANOPORE FABRICATION IN SILICON NITRIDE MEMBRANES WITH A TRANSMISSION ELECTRON MICROSCOPE

摘要

Fabrication of controlled geometry solid-state nanopores (SSNs) using a transmission electron microscope (TEM) is described. Controlling nanopore geometry allows for optimization of the shape and structure of the pore based on the need for specific applications. By manipulating TEM parameters such as current, relative stage settings, and dwell time it is possible to manufacture controlled geometry SSNs in silicon nitride (Si_3N_4) membranes. Nanopores with circular, elliptical, and triangle-like cross-sectional areas were fabricated.