CONTROL DEVICE OF TRANSMISSION ELECTRON MICROSCOPE, TRANSMISSION ELECTRON MICROSCOPE SYSTEM, CONTROL METHOD OF TRANSMISSION ELECTRON MICROSCOPE, AND PROGRAM

摘要

PPROBLEM TO BE SOLVED: To provide a control device of a transmission electron microscope which can facilitate alignment of a transmitted wave and a through-hole of a phase plate. PSOLUTION: The control device 200 of the transmission electron microscope is a control device of the transmission electron microscope 100 including the phase plate 120 that is arranged on a predetermined surface through which the transmitted wave and scattered wave, obtained by transmitting an electron beam through a sample, pass, and that changes at least one of phases of the transmitted wave and scattered wave by passing the transmitted wave through the through-hole. The control device includes an image acquiring unit 210 for acquiring a transmission electron microscope image obtained by interfering the transmitted wave and scattered wave, an operation means 220 for obtaining a fourier conversion pattern by fourier-converting the transmission electron microscope image, and a control information generation means 230 for generating control information for passing the transmitted wave through the through-hole by obtaining positional relationship of the transmitted wave and the through-hole on the predetermined surface from a Fourier transform pattern. PCOPYRIGHT: (C)2011,JPO&INPIT