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Fast 3-D thermal analysis of complex interconnect structures using electrical modeling and simulation methodologies

机译:使用电气建模和仿真方法对复杂互连结构进行快速3-D热分析

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Accurate and fast estimation of VLSI interconnect thermal profiles has become critically important to estimate their impact on circuit/system performance and reliability, which is necessary for reducing product development time and achieving first-pass silicon success. Present commercial thermal analysis tools are incapable of simulating complex structures, particularly in the 3-D domain and are also difficult to integrate with existing design tools. Existing analytical thermal models are not perfect either: they are either not accurate enough or oversimplified. This paper uses a methodology, which exploits existing electrical resistance solvers for thermal simulation, to allow fast acquisition of thermal profiles of complex interconnect structures with good accuracy and reasonable computation cost. Moreover, for the first time, an accurate closed-form thermal model is developed. The model allows for an equivalent medium with effective thermal conductivity (isotropic or anisotropic) to replace the detailed material information in non-critical regions so that complex interconnect structures can be simulated. Using these techniques, this paper demonstrates the simulation of a very complex interconnect structure (~9000 objects or 15 million meshed unknowns after first order isotropic equivalent medium replacement), which is a first time achievement in the area of interconnect thermal analysis. On the other hand, it is shown that an anisotropic equivalent medium is a much better approximation of real interconnect structures from the point of view of accuracy and computation.
机译:准确快速地估计VLSI互连散热曲线对于评估其对电路/系统性能和可靠性的影响至关重要,这对于减少产品开发时间并获得首遍硅片成功至关重要。当前的商用热分析工具无法仿真复杂的结构,尤其是在3-D域中,并且也难以与现有的设计工具集成。现有的分析热模型也不是完美的:它们要么不够准确,要么过于简化。本文使用一种方法,该方法利用现有的电阻求解器进行热仿真,从而能够以良好的精度和合理的计算成本快速获取复杂互连结构的热剖面。此外,首次建立了精确的封闭形式热模型。该模型允许具有等效热导率(各向同性或各向异性)的等效介质替换非关键区域中的详细材料信息,从而可以模拟复杂的互连结构。使用这些技术,本文演示了一个非常复杂的互连结构(在一阶各向同性等效介质替换后约9000个对象或1500万个网格状未知数)的仿真,这是互连热分析领域的首次成就。另一方面,从精度和计算的观点来看,各向异性等效介质是真实互连结构的更好近似。

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