Analysis of film thickness for magnetron sputtering system with more than one workbench

摘要

In this article, the thickness uniformity of thin films deposited by magnetron sputtering system involved in both planetary circumrotate model and traditional model by rectangle target were investigated respectively. It was shown that the thickness uniformity of films by magnetron sputtering system with rotation and revolution at the optimum ratio value of Wz/Wg 0.5 is superiority to traditional system which with 0.3 of thickness relative deviation at coordinative condition. Moreover, the relative deviation was dropped as the addition of distance from substrate to target. The results were in accord with that obtained experimentally.