Study of 5-Mask TFT Array process with Low Cost, High Yield and High Performance Characteristics

摘要

Three types of 5-mask TFT array process have been compared and analyzed their characteristics including TFT performance, process window, etc. Results showing here indicate that a 5-mask TFT manufacturing process can be optimized with low cost, high production yield and high performance. These properties let the reduced mask TFT array process reveal a much higher potential in mass production.