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Doping of the poly-gate by beamline implantation and plasma doping and its influence on the gate oxide reliability

机译：通过束线注入和等离子体掺杂对多晶硅栅进行掺杂及其对栅氧化层可靠性的影响

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《Ion Implantation Technology, 2000. Conference on》|2000年|P.308-311|共4页
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Halimaoui; A.; Lenoble; D.;
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中图分类无线电电子学、电信技术;
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1. A comparison of plasma-induced damage on the reliability between high-k/metal-gate and SiO_2/poly-gate complementary metal oxide semiconductor technology [J] . Wu-Te Weng, Yao-Jen Lee, Horng-Chih Lin, Solid-State Electronics . 2010,第4期

机译：等离子体诱导的高k /金属栅与SiO_2 /多栅互补金属氧化物半导体技术可靠性之间的比较
2. Effects of Polysilicon Gate Doping Concentration on Plasma Charging Damage in Ultrathin Gate Oxides [J] . Chi-Chun Chen, Horng-Chih Lin, Chun-Yen Chang, Electrochemical and solid-state letters . 2000,第2期

机译：多晶硅栅掺杂浓度对超薄栅氧化物等离子体充电损伤的影响
3. Influence of Hydrogen Incorporation on the Reliability of Gate Oxide Formed by Using Low-Temperature Plasma Selective Oxidation Applicable to Sub-50-nm W-Polymetal Gate Devices [J] . Lim K.-Y., Sung M.-G., Cho H.-J., IEEE Electron Device Letters . 2008,第4期

机译：氢掺入对适用于50nm以下W型多金属栅极器件的低温等离子体选择性氧化形成的栅极氧化物可靠性的影响
4. Doping of the poly-gate by beamline implantation and plasma doping and its influence on the gate oxide reliability [C] . A. Halimaoui, D. Lenoble, A. Grouillet, International Conference on Ion Implantation Technology . 2000

机译：通过束线植入和等离子体掺杂掺杂多栅极及其对栅极氧化物可靠性的影响
5. Fabrication and application of tin oxide doped titanium dioxide nanofibers, lead sulfide QDS doped titanium dioxide nanotubes, silver vanadium oxide nanowires. [D] . Xiong, Chunrong. 2007

机译：氧化锡掺杂的二氧化钛纳米纤维，硫化铅QDS掺杂的二氧化钛纳米管，银钒氧化物纳米线的制备与应用。
6. Low‐Thermal‐Budget Doping: Low‐Thermal‐Budget Doping of 2D Materials in Ambient Air Exemplified by Synthesis of Boron‐Doped Reduced Graphene Oxide (Adv. Sci. 7/2020) [O] . Jun‐Hwe Cha, Dong‐Ha Kim, Cheolmin Park, 2020

机译：低热预算掺杂：环境空气中二维材料的低热预算掺杂以硼掺杂的还原氧化石墨烯的合成为例（Adv。Sci。7/2020）
7. Hypothesis on the Influence of the Magnetic Behaviour of Hydrogen Doped Zinc Oxide during Its Plasma Sputtering Process [O] . Ali Salimian, Abul Hasnath, Arjang Aminishahsavarani, 2021

机译：氢掺杂氧化锌磁性磁性行为在其等离子体溅射过程中的影响
8. Sintering Studies of Ga-Doped CeO(sub 2) (Ga-Doped PuO(sub 2) Surrogate) for211 Mixed Oxide Nuclear Fuel [R] . Haertling, C., Huling, J., Park, Y. S. 1999

机译：Ga掺杂CeO（sub 2）（Ga掺杂puO（sub 2）替代物）对211混合氧化物核燃料的烧结研究

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