Numerical dnd experimental analysis of distribuyted electromechanical parastics in the calibration of a fully BiCMOS-integrated capacitive pressure sensor

摘要

The experimental characteriation of integrated micronsensors strongly benefits from the accurate modeling of its operation. This is demonstrated for a fully BiCMOS-integrated pressure sensor, where we studied the finuence of distributed parasitic crosscoupling effects on the signal read-out by cou0pled-field electro-mechanical simulations. In addition, the combination of measurement and simulation enabled the correct identification of all parameters required for the sensor calibration.