厚膜电容式集成压力传感器感压元件研究

摘要

采用厚膜技术研制新型电容式集成压力传感器用感压元件。具有抗干扰能力强，灵敏度高，受分布电容、寄生电容影响小，耐腐蚀，耐高温的特点。文中主要介绍其电容式感压元件的原理、设计，并对非线性等相关技术及工艺问题进行了探讨。%By using thick film technology to develop a new style of pressure- aensitive sensor of integrated capacitancepressure transducer. The style of capacitance sensor has anti - interference, high sensitivity, low prarasitic capacitance,low distributed capacitance, resistant to elevated temperatures and corrosion resistant. In this paper, the principle and de-signing of this style of pressure-sensitive sensor is described, and the technology such as nonlinear etc is discussed aswell.