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Photoelastic measurement of chip-bonding induced strains by infrared polariscope

机译:红外偏光镜对芯片键合诱发应变的光弹性测量

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Strain induced by bonding a GaAs chip on a copper heatsink plate has been measured with a reflection type of infrared polariscope. It is found that the bonding-induced strain reaches the order of 10/sup -4/, which corresponds to about 1/10 of that estimated from the thermal expansion difference for the unit length between GaAs and copper when it is cooled down from the die-bonding temperature to the room temperature.
机译:已经通过反射型红外偏光镜测量了在铜散热板上粘合GaAs芯片引起的应变。发现键合诱发的应变达到10 / sup -4 /的量级,大约是从GaAs和铜之间的单位长度的热膨胀差估计的大约1/10,该热膨胀差是从GaAs和铜之间的单位长度开始的。芯片键合温度为室温。

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