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Study on mechanical characteristics of PZT thin film for sensors and actuators

机译:用于传感器和执行器的PZT薄膜的机械特性研究

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Abstract: Piezoelectric thin films are very promising materials for MEMS applications because they have application flexibility and compatibility with semiconductor and micromachining processes. How to design MEMS devices with piezoelectric thin films, the mechanical characteristics, and how those characteristics can be controlled by process conditions is discussed in this paper. In addition, piezoelectric/electric characteristics must be understood. With this background, mechanical characteristics (Young's modulus and built-in stress) measurements of sputtered Pb(Zrx, Ti1 $MIN x) O$-3$/ thin film, one of piezoelectric materials, have been carried out using the load-deflection method. Relationships between post anneal conditions and those characteristics are discussed. It was shown from the experiment results that Young's modulus increases as anneal temperature/time increases. The maximum value was 76.6 GPa(700 degrees C/3600 sec) which is more than three times larger than that of as-depo film. Built-in stress is also affected by post anneal process and ranges from 0.04 GPa(as-depo) to 0.41 GPa(700 degrees C/60 sec). SEM observation results made it clear that it was caused by film shrinkage due to grain enlargement during anneal process. !6
机译:摘要:压电薄膜是非常有希望的MEMS应用材料,因为它们具有应用灵活性以及与半导体和微加工工艺的兼容性。本文讨论了如何设计具有压电薄膜的MEMS器件,机械特性以及如何通过工艺条件来控制这些特性。另外,必须了解压电/电特性。在这种背景下,利用负载偏转技术对溅射的Pb(Zrx,Ti1 $ MIN x)O $ -3 $ /压电材料之一的薄膜的机械特性(杨氏模量和内应力)进行了测量。方法。讨论了退火后条件与这些特性之间的关系。从实验结果表明,杨氏模量随着退火温度/时间的增加而增加。最大值为76.6 GPa(700摄氏度/ 3600秒),是原液薄膜的三倍以上。内置应力也会受到后退火过程的影响,范围从0.04 GPa(原液)到0.41 GPa(700摄氏度/ 60秒)。 SEM观察结果清楚地表明,这是由于退火过程中晶粒扩大引起的薄膜收缩所致。 !6

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