Piezo electric multilayer actuator i.e. piezo-ceramic multilayer actuator, for use e.g. sensor, has graded electrode with different electrical conductivity and mechanical characteristics within sink in comparison to regions outside sink

摘要

The multilayer actuator (1) has a sandwich structure (3) with an alternating arrangement of a set of piezoelectric layers (10) and a set of electrodes (20). An insulated structure (30) is designed such that a side surface (22) of each electrode is arranged in a sink (50). A graded electrode (60) connects the side surfaces of the electrodes with each other. The graded electrode has a different electrical conductivity and different mechanical characteristics within the sink in comparison to regions outside the sink. An independent claim is also included for a manufacturing method for a piezoelectric multilayer actuator.