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Characterization of electroformed nickel microstructures

机译:电铸镍微结构的表征

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Abstract: Electroformed nickel resonators were constructed and tested in the temperature range of $MIN 40 to 110 degrees C. The temperature sensitivities of the resonant frequencies are $MIN 150 ppm/degrees C, $MIN 200 ppm/degrees C, and $MIN 3000 ppm/degrees C for cantilever beams, ring structures, and clamped-clamped bridges, respectively. The built-in stress for the bridge was estimated to be approximately 2 $MUL 10$+9$/ dyne/cm$+2$/. No resonant frequency shift was detected after long-term (over 60 days), large amplitude vibration. This implies that the electroformed nickel is a viable material for the construction of resonant mechanical sensors. !11
机译:摘要:在$ MIN 40至110摄氏度的温度范围内构造并测试了电铸镍谐振器。谐振频率的温度敏感性分别为$ MIN 150 ppm /°C,$ MIN 200 ppm /°C和$ MIN 3000 ppm /℃,分别用于悬臂梁,环形结构和夹钳式桥梁。桥梁的内置应力估计约为2 $ MUL 10 $ + 9 $ /达因/ cm $ + 2 $ /。长期(超过60天)大振幅振动后未检测到共振频率偏移。这意味着电铸镍是用于构造共振机械传感器的可行材料。 !11

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