首页> 外文会议>Indium Phosphide and Related Materials, 1993. Conference Proceedings., Fifth International Conference on >Double doping: A method to decrease dislocation densities in LEC InP crystals
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Double doping: A method to decrease dislocation densities in LEC InP crystals

机译:双重掺杂:一种降低LEC InP晶体中位错密度的方法

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The authors report on the growth of low-dislocation density low-carrier concentration p-type InP via codoping with CdTe. Four crystals were grown by the liquid encapsulated Czochralski (LEC) technique. The results of electrical and analytical studies suggest that both cadmium and tellurium undergo some chemical reactions before pulling, so that only a minor fraction of the added impurities is available for doping. The effectiveness of this codoping in terms of dislocation density reduction has been confirmed by the structural investigations carried out on the four crystals with low free carrier concentrations. The role of multiple doping as a strategy for dislocation reduction is discussed.
机译:作者报道了通过与CdTe共掺杂来生长低位错密度,低载流子浓度的p型InP。通过液体封装的切克劳斯基(LEC)技术生长了四个晶体。电学和分析研究的结果表明,镉和碲在拉拔之前都会经历一些化学反应,因此添加的杂质中只有一小部分可用于掺杂。这种共掺杂在位错密度降低方面的有效性已经通过对具有低自由载流子浓度的四个晶体进行的结构研究得到了证实。讨论了多重掺杂作为减少位错策略的作用。

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