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A Study on Die Stresses in Flip Chip Package Subjected to Various Hygrothermal Exposures

机译:暴露于湿热条件下倒装芯片封装中的芯片应力研究

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Moisture has been one of the major concerns for package designers and reliability researchers. It is well-known that high humidity combined with high temperature can cause a number of failure modes to electronic devices, such as popcorn cracking, delamination, or electrochemical migration. While the fundamental knowledge of moisture effects on electronic packages has been extensively explored, there have been no published studies on the effects of underfill and substrate moisture absorption on the die stresses development and delamination growth in flip chip assemblies. In this study, on-chip piezoresistive sensors were used to measure moisture-induced device side die stresses in flip chip on laminate packages under three different moisture conditions. The die stresses were also monitored during the subsequent drying to evaluate the reversibility of the moisture effects. After the initial 10 days of moisture exposure, moisture was found to have significant effects on the package, generating tensile die normal stresses of up to 37 MPa under the harshest testing environment (95% RH, 95 °C). Also, it can be observed that more harsh condition produced larger stress level, but the stresses variation under all conditions showed the same behavior. Shear stresses however were found to be quite small relative to normal stresses. Upon the subsequent drying, it was seen that the moisture-induced stress changes were almost fully recordable. In addition to the measurements of the moisture-induced die stresses, a study on hygrothermal properties of polymer materials was conducted where diffusivity, saturated concentration and coefficient of moisture expansion (CME) of underfill and BT (Bismaleimide-Triazine) substrate were characterized under the moisture conditions used in the experiments. The obtained properties were later used for the finite element simulation of the moisture diffusion. The numerical predictions were finally correlated with the experimental results. They were found to be in good agreements.
机译:水分一直是包装设计人员和可靠性研究人员关注的主要问题之一。众所周知,高湿度加上高温会导致电子设备出现许多故障模式,例如爆米花破裂,分层或电化学迁移。虽然已经广泛探索了湿气对电子封装的基础知识,但尚未发表有关底部填充和基板湿气吸收对芯片的影响的应力研究,这些研究关注倒装芯片组件中的应力发展和分层增长。在这项研究中,使用片上压阻传感器在三种不同湿度条件下测量层压封装上倒装芯片中水分引起的器件侧芯片应力。在随后的干燥过程中还监测了模头应力,以评估水分效应的可逆性。在最初暴露于湿气的10天之后,发现水分会对包装产生重大影响,在最苛刻的测试环境(95%RH,95°C)下产生的拉伸模头法向应力高达37 MPa。此外,可以观察到,更苛刻的条件会产生更大的应力水平,但在所有条件下的应力变化都表现出相同的行为。然而,发现剪应力相对于法向应力而言很小。在随后的干燥中,可以看到几乎完全可以记录到由水分引起的应力变化。除了测量水分引起的模头应力外,还对聚合物材料的湿热性能进行了研究,在此条件下,对底部填充材料和BT(苯丙亚胺-三嗪)基材的扩散率,饱和浓度和水分膨胀系数(CME)进行了表征。实验中使用的湿度条件。随后将获得的特性用于水分扩散的有限元模拟。数值预测最终与实验结果相关。他们被认为是良好的协议。

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