Dedicated test-structures for investigation of the thermal impact of the BEOL in advanced SiGe HBTs in time and frequency domain

摘要

This paper presents a study on the thermal impact of the back-end-of-line (BEOL) in a state-of-the-art SiGe HBT technology for high power applications. A recursive RC network is proposed to model the thermal behavior of the BEOL and is validated with measurements on dedicated test-structures in the time and frequency domain.