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Dedicated test-structures for investigation of the thermal impact of the BEOL in advanced SiGe HBTs in time and frequency domain

机译:专用的测试结构,用于调查DEAD SIGE HBTS在时间和频率域中的BEOL的热撞击

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This paper presents a study on the thermal impact of the back-end-of-line (BEOL) in a state-of-the-art SiGe HBT technology for high power applications. A recursive RC network is proposed to model the thermal behavior of the BEOL and is validated with measurements on dedicated test-structures in the time and frequency domain.
机译:本文提出了对高功率应用的最先进的SiGe HBT技术中后端线(BEOL)的热冲击的研究。建议递归RC网络模拟BEOL的热行为,并在时间和频域中的专用测试结构上进行验证。

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