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Essential factors influencing the wettability of Sn-3.OAg-0.5Cu solder balls on Au pad of the right-angle solder interconnect in laser jet solder ball bonding

机译:影响激光射流焊球键合的直角焊料互连Au-3. oag-0.5cu焊球润湿性的基本因素

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As an untouched soldering technology, the laser jet solder ball bonding (SBB) provides a flexible packaging method for three-dimensional (3D) packaging and assembly, such as the right-angle interconnect in the hard disk drive (HDD) and temperature-sensitive devices. The microstructure and reliability of SBB interconnects have been widely studied. However, the problem of poor wetting in the SBB process, induced by the surface contamination on bonding pads and the oxidation of solder balls, is a tough issue and the mechanism is still unclear. In this study, the essential factors leading to poor wetting of Sn3.0Ag-0.5Cu (SAC305) solder balls with a diameter of 70 μm on Au pads have been clarified, in particular the correlation between the depth of the oxidation layer and poor wettability of SAC305 solder balls is investigated by quantitative analysis using scanning electron microscopy (SEM) and auger electron spectroscopy (AES). Examination results of surface morphologies of solder balls by SEM show clearly that the solder ball does not spread completely on both sides of Au pad, indicating a poor wetting caused mainly by the solder balls. Further, the surfaces of the solder balls with poor wettability and the normal ones were comparatively investigated by using AES with Ga ion sputter with different sputtering times of removing a half of the maximum oxidation layer of solder balls. The results manifest that the sputtering time corresponding to the solder balls with poor wettability is 5.6 minutes, much longer than 1.6 min used for the balls with good wettability. In order to confirm the results, the sputtering times of 12 solder balls from the batch with poor wettability as confirmed and 11 solder balls from the batch with good wettability as confirmed were further characterized, and their corresponding yields of 500 solder interconnects in mass production were counted. The statistical results indicate that 2.2 minutes can be determined to be a criterion for the poor wetting. According to the testing result of the standard samples, the sputtering depth is 0.9 nm per minute for the Ga ion sputter. Finally, it has been estimated that the critical depth of the oxidation layer is about 4 nm in 70 μm diameter SAC305 solder balls during laser jet flux-free SBB process. When the oxidation layer is more than 4 nm, the poor wetting occurs.
机译:作为一种未触发的焊接技术,激光射流焊球键合(SBB)为三维(3D)包装和组装提供了一种柔性包装方法,例如硬盘驱动器(HDD)中的直角互连和温度敏感设备。 SBB互连的微观结构和可靠性已被广泛研究。然而,在粘合垫上的表面污染和焊球氧化诱导的SBB过程中润湿不良的问题是一个艰难的问题,并且机制仍不清楚。在这项研究中,已经阐明了在Au焊盘上具有直径为70μm的SN3.0AG-0.5CU(SAC305)焊球较差的基本因素,特别是氧化层深度与润湿性差之间的相关性。通过使用扫描电子显微镜(SEM)和螺旋钻电子光谱(AES)来研究SAC305焊球。 SEM通过SEM显示焊球表面形态的检查结果清楚地表明,焊球不会完全在Au垫的两侧涂抹,表明主要由焊球引起的润湿不良。此外,通过使用具有Ga离子溅射的AES具有较差的润湿性和正常的焊球和正常的焊球表面的表面与去除焊球的最大氧化层的一半的不同的溅射时间相对调查。结果表明,与润湿性差的焊球相对应的溅射时间为5.6分钟,比具有良好润湿性的球的长度超过1.6分钟。为了确认结果,进一步表征了从批量和具有良好润湿性的批量的批量批量和11焊球具有较差的批量不良的溅射次焊球的溅射时间,并且其在批量生产中的500次焊料互连的相应产率为批量生产计数。统计结果表明2.2分钟可以确定为润湿不良的标准。根据标准样品的测试结果,溅射深度为GA离子溅射每分钟0.9nm。最后,据估计,在激光射流通量SBB工艺期间,氧化层的临界深度在70μm直径的SAC305焊球中为约4nm。当氧化层大于4nm时,发生较差的润湿。

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