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Electro-thermal characterization of Through-Silicon Vias

机译:通过硅通孔的电热表征

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Through-Silicon Vias (TSVs) are the vertial vias that enable three-dimensional integration by providing shorter, faster and denser interconnects. In this work, we investigate their thermal properties and show that TSVs used for power and ground connections can suffer from high thermal dissipations, which can lead to reliability and timing errors. Due to nature of current flow on 3D ICs (i.e. from package to each tier), we show that the TSVs near the package tier endure high current flows and high temperatures which eventually lead to Joule heating and electromigration (EM) phenomena. Such analyses bring forth the importance of power- and thermal-aware TSV placement.
机译:通过硅通孔(TSV)是梯形通孔,通过提供更短,更快和更密集的互连来实现三维集成。在这项工作中,我们研究了它们的热性质,并表明用于电源和接地连接的TSV可以遭受高热量耗散,这可能导致可靠性和定时误差。由于当前流的本质,3D ICS(即从包到每个层的包),我们表明包装层附近的TSV且最终导致焦耳加热和电迁移(EM)现象的高电流流动和高温。这种分析带来了动力和热感知TSV放置的重要性。

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