Process integration of best in class specific-on resistance of 20V to 60V 0.18#x00B5;m bipolar CMOS DMOS technology

摘要

The evolution of Bipolar CMOS DMOS (BCD) technology leads in the improvement of design technology to produce better device performance with fabrication cost effectiveness as concerned. In this paper, 0.18µm BCD technology with linear p-top layer N-channel LDMOS structure from 20V to 60V is presented with best in class Ron for both N-channel and P-channel LDMOS compared to recent BCD technology works. The optimization of current gain of 20V BJT has been done by adjustment of emitter width and boron doping concentration of base with increasing of current gain up to ten times higher without significantly change the breakdown voltage.