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Temporary bonding for Chips In Wafer processing

机译:晶圆加工中芯片的临时粘合

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Chip In Wafer is a very challenging concept because this solution allows wafer scale processes for System in Package and a very high miniaturization and performance level. This paper describes a technologies developed for Chip integration In Wafer (CIW). The approach consists in reconstituting a wafer from heterogeneous chips embedded in a resin with the active sides coplanar. This paper present the development of a new process using wafer substrate including alignment marks and a transparence adhesive which allow an accurate dies positioning and holding during the polymer molding. The process presented in this paper is compatible for chips in polymer wafer, chips in silicon wafer, chips in glass wafer and some other frame.
机译:晶片内晶片是一个非常具有挑战性的概念,因为该解决方案允许晶片级封装工艺用于系统级封装,并且具有很高的小型化和性能水平。本文介绍了为晶圆内芯片集成(CIW)开发的技术。该方法包括用嵌入在树脂中且活性面共面的异质芯片重构晶片。本文介绍了使用晶片基板的新工艺的发展,该基板包括对准标记和透明胶粘剂,可以在聚合物成型过程中精确定位和固定模具。本文介绍的工艺与聚合物晶片中的芯片,硅晶片中的芯片,玻璃晶片中的芯片和其他框架兼容。

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