Collective fabrication of all-organic microcantilever chips based on a hierarchical combination of shadow-masking and wafer-bonding processing methods

摘要

This paper describes a new collective microfabrication process of all-organic microcantilever chips. This method is based on the hierarchical combination of shadow-masking and wafer-bonding processes. The shadow-masking combines deposition and patterning in one step thanks to spray-coating through a polymer microstencil that allows patterning of thermosensitive materials such as PMMA. The shadow-masking parameters have been optimized to obtain suspended microcantilevers characterized by a convenient thickness profile. The resulting PMMA structures were then transferred onto SU-8 chips by using an SU-8 wafer-bonding process. The effect of the UV exposure dose of both SU-8 layers in contact on the bonding quality has been investigated and optimized. With the optimized bonding process, we have achieved the large-scale transfer of microstructures with a yield of 100% and a bond strength of 50 MPa. These microcantilevers were also tested at resonance to determine Young's moduli of patterned polymers. The low values obtained (below 5 GPa) make these organic MEMS structures strong candidates for highly sensitive sensing applications when used in the static mode.