High quality zinc oxide (ZnO) films were epitaxially grown on R-plane sapphire substrates by metalorganic chemical vapor deposition at temperatures in the range 350-600°C. In-situ nitrogen compensation doping was performed using NH{sub}3. The metalsemiconductor-metal ultraviolet-sensitive photodetectors were fabricated on nitrogen-compensation-doped epitaxial ZnO films. The photoresponsivity of these devices exhibits a linear dependence upon bias voltage up to 10 V, with a photoresponsivity of 400 A/W at 5 V. The rise and fall times are 1 and 1.5μs. respectively.
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