MSM TYPE ULTRAVIOLET LIGHT RECEIVING ELEMENT, AND MSM TYPE ULTRAVIOLET LIGHT RECEIVING DEVICE

摘要

To provide an MSM type ultraviolet light receiving element whose current value in a dark condition is extremely low, and that has good light reception sensitivity at incidence of light.SOLUTION: An MSM type ultraviolet light receiving element 1 comprises: a substrate 2; a first nitride semiconductor layer 3 formed on the substrate; a second nitride semiconductor layer 4 formed on the first nitride semiconductor layer; and a first electrode 5 and a second electrode 6 formed on the second nitride semiconductor layer. The first nitride semiconductor layer contains AlGaN (0.45≤X≤0.90). The second nitride semiconductor layer contains AlGaN. A film thickness t (nm) satisfies 5≤t≤25. The first electrode and the second electrode contain a material containing at least three of Ti, Al, Au, Ni, V, Mo, Hf, Ta, W, Nb, Zn, Ag, Cr and Zr. Al composition ratios X and Y and the film thickness t satisfy -0.009×t+X+0.22-0.03≤Y≤-0.009×t+X+0.22+0.03.SELECTED DRAWING: Figure 1