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Electrical and optical properties of annealed semi-insulating GaAs grown by vertical zone melt technique

机译:垂直区熔融技术生长的退火半绝缘GaAs的电学和光学性质

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Electrical and optical properties of undoped semi-insulating GaAs grown by the vertical zone melt (VZM) technique and annealed at 950/spl deg/C under As overpressure have been characterized. The 950/spl deg/C annealing significantly improves the uniformity and increases both EL2 concentration and mobility. Cu incorporation into the VZM materials has been observed.
机译:表征了通过垂直区熔体(VZM)技术生长并在砷超压下以950 / spl deg / C退火的未掺杂半绝缘GaAs的电学和光学性质。 950 / spl deg / C的退火显着提高了均匀性,并提高了EL2浓度和迁移率。已经观察到Cu结合到VZM材料中。

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