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A Multilayer Ceramic Package For Silicon Micromachined Accelerometers

机译:用于硅微机械加速度计的多层陶瓷封装

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A novel ceramic package for a two-chip silicon accelerometer and the signal conditioning ASIC chip assembly has been developed with the advantage of being directly mounted on a PC board thus eliminating the need for additional mounting structures for automotive airbag applications. The hermetic package is designed to be mounted either in vertical or flat positions on a PC board, thus enabling the sensing directions of the accelerometer to be parallel or perpendicular to the plane of the PC board for front and side air bag applications. The package has been modeled for thermal stress induced during assembly and operating conditions. The dynamics of the package was determined using static, harmonic, modal, random vibration and transient dynamic modeling. Testing of the mounted package on the shaker shows flat frequency response to 4.5kHz. Temperature cycling on the unit between -40/spl deg/ and 85/spl deg/C shows no failures or performance degradation over 2400 temperature cycles.
机译:已经开发出了一种新颖的用于两芯片硅加速度计和信号调节ASIC芯片组件的陶瓷封装,其优点是可以直接安装在PC板上,从而消除了用于汽车安全气囊应用的其他安装结构的需要。密封包装被设计为垂直或平面安装在PC板上,从而使加速度计的传感方向平行于或垂直于PC板的平面,适用于前部和侧面安全气囊应用。该封装针对在组装和运行条件下产生的热应力进行了建模。使用静态,谐波,模态,随机振动和瞬态动力学模型确定包装的动力学。对振动器上已安装封装的测试表明,其平坦的频率响应为4.5kHz。装置在-40 / spl deg /和85 / spl deg / C之间的温度循环显示在2400个温度循环内没有故障或性能下降。

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