Torsion testing of diffusion bonded LIGA formed nickel

摘要

A test technique has been devised which is suitable for the testing of the bond strength of batch diffusion bonded LIGA or DXRL defined structures. The method uses a torsion tester constructed with the aid of LIGA fabrication and distributed torsion specimens which also make use of the high aspect ratio nature of DXRL based processing. Measurements reveal achieved bond stengths of 130 MPa between electroplated nickel with a bond temperature of 450 deg C at 7 ksi pressure which is a sufficiently low temperature to avoid mechanical strength degradation.