Aerosol-Assisted CVD of SnO_2 Thin Films for the Room-Temperature Detection of Hydrogen Sulfide

摘要

High-quality SnO_2 thin-film materials capable of detecting H_2S gas of low concentrations at room temperature was demonstrated in this paper. We employed aerosol-assisted chemical vapor deposition process for the deposition of SnO_2 thin films on alumina substrates with pre-patterned electrodes. The gas-sensing performances of the films prepared under different deposition conditions were systematically compared and analyzed. When SnCl_2-2H_2O was used as the precursor, a response sensitivity of 98.4 toward 50 ppm of H_2S at room temperature was achieved. At room temperatures, the resistance upon the H_2S gas exposure could recover to 90% of the initial resistance of the sensor when the H_2S gas flow was turned off.