Aerosol-Assisted CVD of SnO_2 Thin Films for Gas-Sensor Applications

摘要

In this article is a report of SnO_2 deposition by aerosol-assisted (AA)CVD from tin complexes, [Sn(18-Cr-6)Cl_4] and [Sn(H_2O)_2Cl_4](18-Cr-6). The structure and properties of the precursors, used to synthesize SnO_2 layers by AACVD for the first time, are characterized with the help of X-ray diffraction (XRD), infrared (IR), and thermogravimetric analysis (TGA). Each complex is deposited by AACVD at 250, 400, and 500 °C in a flow of N_2. The resulting films are studied by XRD and atomic force microscopy (AFM). Gas-sensing properties of the deposited layers are tested to 10 ppm NO_2 in air. The maximum sensor response to the analyte is measured at 300 °C.