Peracetic acid as active species in mixtures for selective etching of SiGe/Si layer systems - Aspects of chemistry and analytics

摘要

Of the many analytical techniques considered, the UV-Vis method using ABTS and the variation of the classical iodometric titration with catalase have proven their reliability and accuracy. Water withdrawal is effective for both kinetics and equilibrium, temperature (reported in [4]) only affects the reaction rate. An ideal combination of water withdrawal and temperature leads to fast and efficient PAA formation. The etchrates correlate well with PAA conc. Over the entire time of formation, with an 18:1 preference for SiGe over sSOI and high etchrates on SiGe.