X-ray spectrometry for wafer contamination analysis and speciation as well as for reference-free nanolayer characterization

摘要

Total-reflection, grazing-incidence and reference-free X-ray fluorescence analysis employing synchrotron radiation can substantially contribute to the contamination analysis and speciation on semiconductor surfaces as well as to the characterization of nanolayered systems. The continuing development of instrumentation by PTB is dedicated to high-end investigations in the R&D of semiconductor samples related to industrial applications.