Large Scale Arrays of Microcavity Plasma Devices Based on Self-Assembled Ring Electrodes and Interconnects

摘要

Addressable, large scale arrays of microcavity plasma devices based on A1/A12O3 electrode have been fabricated by wet electrochemical process suitable for low cost manufacturing. Dielectric encapsulated aluminum microcavity electrodes having cavities with a diameter of 50-200 μm are formed. Automatic formation of Al interconnects and ring electrodes, fully encapsulated by alumina, in planar arrays of Al2O3/Al/Al2O3 microcavity plasma devices has been accomplished by electrochemical processing of Al foil. Following the fabrication of cylindrical microcavities in 127 μm thick Al foil, virtually complete anodization of the foil yields azimuthally-symmetric Al electrodes surrounding each cavity and interconnects between adjacent microcavities that are produced and simultaneously buried within a transparent A12O3 film without the need for conventional patterning techniques. Self-patterned, linear arrays have been excited by a sinusoidal or bipolar pulse voltage waveform and operated in 400-700 Torr of rare gas. Discharge properties and electrode formation characteristics will be discussed in detail.