Dynamics of Thermal Field and Powder Sublimation in an Inductively Heated AlN Bulk Crystal Growth Process

摘要

In this paper, an integrated model considering induction heating, transient heat transfer and crystal growth has been developed to study dynamic response of temperature and powder sublimation in an aluminum nitride (AlN) growth system. The electromagnetic field and induction heat generation are calculated by the Maxwell equations. Transient temperature distribution in the growth chamber is simulated by energy equation accounting for conduction/radiation within and between various components. In order to provide proper temperature control during sublimation growth, dynamic responses of temperature and temperature difference of the bottom and top external surfaces of the growth crucible to power variation and coil position movement are simulated. Finally the crystal and powder shapes as a function of time are predicted and compared with dynamic experimental observation.