ALN BULK SINGLE CRYSTAL, SEMICONDUCTOR DEVICE, AND PROCESS FOR PRODUCING ALN SINGLE CRYSTAL BULK

摘要

An object of the present invention is less defective even when using a single crystal of the different materials as a crystal, to provide high-quality bulk single crystals of AlN and a method of manufacturing the same, and a semiconductor device. By a surface (1a) of the longitudinal hexagonal system single crystal substrate as a crystal (1) select 10~80 ° inclined surface on the C-plane (Fig. 1 (a)), the surface (1a) sublimation method on AlN It characterized in that for growing a single crystal 2 as a growth surface (2a) (FIG. 1 (b)). ;