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Homogeneity of composition in evaporated Pb_(1-x)Ge_xTe thin films

机译:蒸发的Pb_(1-x)Ge_xTe薄膜中组成的均质性

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PbTe based semiconductors are well-known narrow gap Ⅳ-Ⅵ compounds, which are of interest due to potential application in the fabrication of photo-detectors in the mid- and far infrared spectral range. Among them, Pb_(1-x)Ge_xTe is known to have wider band gap than PbTe, which has been used to fabricate photo-detectors with shorter wavelength (λ < 6.7 μm). However, the homogeneity of composition in evaporated Pb_(1-x)Ge_xTe thin films directly from bulk alloys has not been investigated. In the paper, we report the investigation that the homogeneity of composition on the surface was studied using energy-dispersive X-ray analysis (EDAX), and the compositional depth profiles was investigated using Auger electron spectroscopy (AES) in combination with argon ion sputtering. ASE depth profiling and characterization of details in the Ge concentration gradient is demonstrated.
机译:基于PbTe的半导体是众所周知的窄间隙Ⅳ-Ⅵ化合物,由于在中红外和远红外光谱范围内光电探测器的制造中具有潜在的应用前景而备受关注。其中,已知Pb_(1-x)Ge_xTe具有比PbTe宽的带隙,PbTe已被用于制造波长较短(λ<6.7μm)的光电探测器。但是,尚未研究直接从块状合金中蒸发的Pb_(1-x)Ge_xTe薄膜中的成分均匀性。在本文中,我们报告了以下研究:使用能量色散X射线分析(EDAX)研究了表面成分的均匀性,并使用俄歇电子能谱(AES)结合氩离子溅射研究了成分深度分布。演示了ASE深度分析和Ge浓度梯度细节的表征。

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