COMPOSITION FOR FORMING Ba(1-x)SRxTiyO3 THIN FILM CAPABLE OF COATING REPEATEDLY AND CALCINING AT LOW TEMPERATURE AND METHOD FOR FORMING THE Ba(1-x)SRxTiyO3 THIN FILM

摘要

PURPOSE: A composition for forming a Ba(1-x)SRxTiyO3 thin film is provided, which can coat repeatedly and calcine at a low temperature, is excellent in solubility of raw material, stability and high electric property, and dose not cause cracks. And a method for forming the Ba¬1-xSR¬xTi¬yO¬3 thin film is provided. CONSTITUTION: The composition for forming the Ba(1-x)SRxTiyO3 thin film is produced by mixing an organic barium compound, an organic strontium compound, and a titanium alkoxide in an organic solvent, wherein the molar ratio of Ba:Sr:Ti is (1-x):x:y(0x1, 0.9=y=1.1). The organic barium compound and the organic strontium compound are metal salts of carboxylic acid represented by the formula CnH2n+1COOH(3=n=7) and carboxylates represented by the formula(1), wherein R1 to R6 are hydrogen, methyl, or ethyl and M is Ba or S. And the method for forming the Ba¬1-xSR¬xTi¬yO¬3 thin film comprises the steps of: spreading the composition on a substrate and drying at 150-400deg.C repeatedly to obtain a desired thickness of the film; calcining at 450-800deg.C to crystallize.