X-ray optical sectioning microscopy: towards visualization of buried function layers andinterfaces in thin films (I)

摘要

Periodically-packed multilayers play an important role in many material systems includingsemiconductors, magnets and optical devices. Generally speaking, performance of these materials aremostly determined by the perfect periodicity of multilayers and the homogeneity of every layer. Therefore,defects such as inhomogeneous impurity and layer distortion may dramatically decrease the performance,and hence they should be carefully inspected and specially discussed. However, because every buriedfunction layer is generally only a few nanometers thick, it is very difficult to detect the exact depth of thedefects in a non-destructive way. For this reason, we developed a new technique of X-ray optical sectioningmicroscopy.