METHOD FOR FABRICATING A MULTILAYERED ENCAPSULATION THIN FILM WITH OPTICAL FUNCTIONALITY AND THE MULTILAYERED ENCAPSULATION THIN FILM FABRICATED BY THE SAME, USING REFLECTION BARRIER FILM BY CONTROLLING REFRACTIVITY DISTRIBUTION

摘要

PURPOSE: A method for fabricating a multilayered encapsulation thin film having optical functionality and the multilayered encapsulation thin film fabricated by the same are provided to easily form the multilayered encapsulation thin film with the different density and the refractivity by performing the reactive or non-reactive PVD process.;CONSTITUTION: A physical vapor deposition apparatus includes a plurality of targets in one vacuum chamber. A first thin film(2) is formed on the substrate(1) with the reactive or the non-reactive PVD process, using a part of target in the vacuum chamber. A second thin film(3) is formed on the first thin film with the reactive or non-reactive PVD process, using the other target within the vacuum chamber.;COPYRIGHT KIPO 2010